1992    
1993    
1994    
1995    
1996    
1997    
1998    
1999    
2000    
2001    
2002    
2003    
2004    
2005    
2006    
2007    
2008    
2009    
2010    
2011    
2012    
2013    
2014    
2015    
2016    
Went, M. R., Winkelmann, A., Vos, M.

Quantitative measurements of Kikuchi bands in diffraction patterns of backscattered electrons using an electrostatic analyzer
Ultramicroscopy 109, (10),pp 1211-1216 (2009)
Diffraction patterns of backscattered electrons can provide important crystallographic information with high spatial resolution. Recently, the dynamical theory of electron diffraction was applied to reproduce in great detail backscattering patterns observed in the scanning electron microscope (SEM). However, a fully quantitative comparison of theory and experiment requires angle-resolved measurements of the intensity and the energy of the backscattered electrons, which is difficult to realize in an SEM. This paper determines diffraction patterns of backscattered electrons using an electrostatic analyzer, operating at energies up to 40 keV with sub-eV energy resolution. Measurements are done for different measurement geometries and incoming energies. Generally a good agreement is found between theory and experiment. This spectrometer also allows us to test the influence of the energy loss of the detected electron on the backscattered electron diffraction pattern. It is found that the amplitude of the intensity variation decreases only slowly with increasing energy loss from 0 to 60 eV.