Premper, J., Sander, D., Kirschner, J.
Cantilever stress measurements for pulsed laser deposition of perovskite oxides at 1000 K in an oxygen partical pressure of 10−4 millibars
Review of Scientific Instruments 86, (3),pp 033902/1-5 (2015)
An in situ stress measurement setup using an optical 2-beam curvature technique is described which
is compatible with the stringent growth conditions of pulsed laser deposition (PLD) of perovskite
oxides, which involves high substrate temperatures of 1000 K and oxygen partial pressures of
up to 1 x 10−4 millibars. The stress measurements are complemented by medium energy electron
diffraction (MEED), Auger electron spectroscopy, and additional growth rate monitoring by a quartz
microbalance. A shielded filament is used to allow for simultaneous stress and MEED measurements
at high substrate temperatures. A computer-controlled mirror scans an excimer laser beam
over a stationary PLD target. This avoids mechanical noise originating from rotating PLD targets,
and the setup does not suffer from limited lifetime issues of ultra high vacuum (UHV) rotary
feedthroughs.