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Teichert, Ch., Barthel, J., Oepen, H.-P., Kirschner, J.

Fabrication of nanomagnet arrays by shadow deposition on self-organized semiconductor substrates
Applied Physics Letters 74, (4),pp 588-590 (1999)
It is demonstrated how large-scale arrays of nanomagnets can be efficiently fabricated by shadow deposition onto faceted surfaces of self-organized Si(1−x)Gex films. By pulsed laser deposition of Co in a grazing incidence geometry, we succeeded to cover just one selected type of facets resulting in isolated Co patches with an areal density of about 0.25X10(12)/in.2. These uniformly oriented nanomagnets have a parallelogram-shaped base with about 25 nmX35 nm edge lengths. Magneto-optic Kerr effect measurements reveal a clear in-plane anisotropy of the nanomagnets.

ki-1999-f01