1992    
1993    
1994    
1995    
1996    
1997    
1998    
1999    
2000    
2001    
2002    
2003    
2004    
2005    
2006    
2007    
2008    
2009    
2010    
2011    
2012    
2013    
2014    
2015    
2016    
Hanb├╝cken, M., Szkutnik, P.D., Sander, D., Dulot, F., Kraus, A., Jecksties, C., d' Avitaya, F. A., Neddermeyer, H.

Scanning tunneling microscopy study of the stability of nanostructures on Si(111) at elevated temperatures
Surface Science 507-510, pp 615-618 (2002)
The creation and local reorganisation of periodically structured Si(111) substrates is described. A regular hole pattern is produced on vicinal Si(111) surfaces by lithographic techniques. After heat treatment this pre-structured Si surface transforms into terraced and stepped regions. The resulting terrace size can be controlled by the layout of the hole pattern. The early stage of the structural changes were studied by scanning tunnelling microscopy and secondary electron microscopy as a function of the annealing temperature and for different dimensions of the hole pattern. A simple model is proposed which ascribes the observed morphological changes to an anisotropic surface diffusion on the patterned surface. It is proposed that the variation of the hole diameter and spacing between holes can be employed to control systematically the resulting surface structure after heat treatment.